@article{2007-schulze-czarnetzki-j-phy-conf-ser-v86-p012010, Abstract = {The intention of the paper is to give an example on how different plasma diagnostics can be combined in a synergistic way in order to investigate new physics. The link between the individual diagnostics has to be provided by theoretical concepts that predict certain relations between the different plasma parameters. The example chosen here is the effect of self-excited plasma series resonances in asymmetric capacitively coupled RF discharges. These resonance oscillations lead to high frequency current oscillations and are caused by a series resonance between the capacitive sheath and the effective inductance of the bulk which results from electron inertia. The non-linearity of the sheath is essential for the self-excitation of these oscillations. Laser spectroscopic electric field measurements, phase and space resolved optical emission spectroscopy, current, voltage, and Langmuir probe measurements are combined. The synergistic effect of these diagnostics in combination with a simple analytical model for the modification of the electron energy distribution function by electron beams yields information on cause and effect of electron heating and a better understanding of these fundamental phenomena.}, Author = {Schulze, J. AND Kampschulte, T. AND Luggenhölscher, D. AND Czarnetzki, U.}, Journal = {J. Phys.: Conf. Ser.}, Pages = {012010}, Title = {{Diagnostics of the plasma series resonance effect in radio-frequency discharges}}, Volume = {86}, Year = {2007} }