@article{2016-pfeifer-painter-opt-exp-v24-11-p11407,
	Abstract = {<p>
	We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V^2 with an on-chip capacitor that was optimized to exert forces up to 1 µN at 10 V operation voltage. Optical resonance frequencies around 190 THz with Q-factors up to 2.2 × 10^6 place the structure in the well-resolved sideband regime with vacuum optomechanical coupling rates up to g_0/2&pi; = 353 kHz. Tuning can be used, for instance, to overcome variation in the device-to-device acoustic resonance frequency due to fabrication errors, paving the way for optomechanical circuits consisting of arrays of optomechanical cavities.</p>},
	Author = {Pfeifer, H. AND Paraïso, T. AND Zang, L. AND Painter, O.},
	Journal = {Optics express},
	Pages = {11407},
	Title = {{Design of tunable GHz-frequency optomechanical crystal resonators}},
	Volume = {24 (11)},
	Year = {2016}
}