@article{2005-meschede-j-phy-con-ser-v19-p118, Abstract = {Recent advances in atomic nanofabrication with laser manipulated atomic beams are discussed with regard to the creation of arbitrary structures.}, Author = {Meschede, D.}, Journal = {J. Phys.: Conference Series}, Pages = {118}, Title = {{Atomic nanofabrication: perspectives for serial and parallel deposition }}, Volume = {19}, Year = {2005} }