@article{2003-meschede-yea-of-sci-and-tec-mcg, Abstract = {Atom lithography designates a physical method where the forces exerted by interfering laser beams on the atoms of an atomic beam are used to steer the atoms into nanostructures fabricated on a plane surface. While atom lithography is the most frequently used term, the method is also known as light-force lithography and atomic nanofabrication (ANF).}, Author = {Meschede, D.}, Journal = {Yearbook of Science and Technology, McGraw-Hill}, Pages = {}, Title = {{Atom lithography}}, Volume = {}, Year = {2003} }